Cl2/O2 Discharge a global (volume averaged) model study

Abstract

A global model (volume avaraged) is used to study how addition of a few chemical reactions involving oxygen species influences the discharge composition of a Cl2/O2 discharge. A global model allows us to investigate the effects of excited species, negative ions and particular reactions on the overall discharge. A revised reaction set of the Cl2/O2 discharge model was used where 34 reactions involving oxygen were added and compared to an earlier Cl2/O2 model. Comparison to the earlier work shows that the density of O2(bSigma) increases, the density of O(D) decreases and the density of ozone O3 is lower than before at high pressure (100 mTorr) going from being the third most abundant molecule to being the sixth most abundant molecule. The electron temperature remains almost unchanged and the electronegativity exhibits only a slight difference from earlier models, the biggest difference being at low absorbed power for pure oxygen. From the results it can be seen that the new reactions have a big effect on certain species of the Cl2/O2 discharge and thus a further study is needed.